Instrument Details

The FEI Nova NanoSEM is a high-performance field emission scanning electron microscope (FESEM) designed for high-resolution imaging and advanced material characterization. This versatile instrument excels at analyzing a wide range of challenging materials, from bulk samples, nanoparticles, and thin films to organic samples, offering ultra-high resolution and flexibility for both conductive and non-conductive materials.

Key Features:

• Ultra-High Resolution Imaging: Achieves resolution down to 1.0 nm at 15 kV with beam deceleration and 0.8 nm at 30 kV in STEM mode.
• Advanced Detection System: Includes Everhardt-Thornley SED, in-lens secondary and backscatter detectors (TLD-SE/BSE), retractable Backscattered Detector, and STEM BF/DF detectors for comprehensive imaging.
• Beam Energy and Current Range: Continuously adjustable 20 eV to 30 keV beam energy and probe current up to 200 nA.
• Low Vacuum Capabilities: True low-vacuum mode for high-resolution imaging of non-conductive and contaminating materials.
• High Precision Stage: Motorized 5-axis stage with rotation, tilt, and high repeatability. Supports samples up to 150 mm diameter and weights up to 500 g.
• Integrated Plasma Cleaner
• Nav-Cam™, Correlative Navigation
• EDAX “Octane Pro” SDD Energy Dispersive X-Ray Spectroscopy (EDX)
• EDAX “Hikari Pro” 600pps Electron Backscatter Diffraction (EBSD) detector